Single Ion Implantation of Bismuth
نویسندگان
چکیده
Ion Implantation In article number 2000237 by Nathan Cassidy, Roger Webb, David Cox, and co-workers, preliminary results are presented from the first commercially produced implanter specifically designed for rapid precise positioning of single ions into device structures solid state quantum technology applications. Specifically implantation bismuth Si, Ge, Cu, Au reported, counting detection efficiency ion implants factors that affect such efficiencies determined.
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ژورنال
عنوان ژورنال: Physica Status Solidi A-applications and Materials Science
سال: 2021
ISSN: ['1862-6300', '1862-6319']
DOI: https://doi.org/10.1002/pssa.202170010