Simulation of plasma processes for microelectronic fabrication
نویسندگان
چکیده
منابع مشابه
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∗ Gintic Institute of Manufacturing, 71 Nanyang Drive, Singapore 639798. Emails: {cclim,yhlow,bpooi,sjain}@gintic.gov.sg # Visiting Researcher, from Department of Computer Science, University of Exeter, Exeter, EX4 4PT, U.K. Email: [email protected] + Centre for Advanced Information Systems, School of Applied Science, Nanyang Technological University, Singapore 639798. Emails: {aswtcai,ash...
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ژورنال
عنوان ژورنال: Pure and Applied Chemistry
سال: 1999
ISSN: 1365-3075,0033-4545
DOI: 10.1351/pac199971101863