منابع مشابه
Porous silicon bulk acoustic wave resonator with integrated transducer
: We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
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ژورنال
عنوان ژورنال: The Journal of the Acoustical Society of America
سال: 1989
ISSN: 0001-4966
DOI: 10.1121/1.2027069