Silicon surface patterning via galvanic microcontact imprinting lithography
نویسندگان
چکیده
منابع مشابه
Patterning colloidal films via evaporative lithography.
We investigate evaporative lithography as a route for patterning colloidal films. Films are dried beneath a mask that induces periodic variations between regions of free and hindered evaporation. Direct imaging reveals that particles segregate laterally within the film, as fluid and entrained particles migrate towards regions of higher evaporative flux. The films exhibit remarkable pattern form...
متن کاملSilicon microcontact printing engines
A method of self-aligned, microcontact printing that avoids the need for dedicated alignment and stamping equipment is demonstrated. Complete miniature print engines combining elastically supported print heads with alignment structures that mate with corresponding features on etched substrates to allow mechanical registration are constructed from silicon parts. The impression can be transferred...
متن کاملIn situ negative patterning of p-silicon via scanning probe lithography in HF/EtOH liquid bridges.
We succeeded in extending local oxidation to in situ negative patterning. HF/EtOH was used as both gap-bridging electrolyte and oxyanion source. EtOH and HF were found to be able to accelerate the growth of silicon oxide and simultaneously etch grown oxide, respectively. These findings are expected to open new possibilities in utilizing local oxidation nanolithography in order to directly fabri...
متن کاملNanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography
Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the ...
متن کاملPlasma Lithography Surface Patterning for Creation of Cell Networks
Systematic manipulation of a cell microenvironment with micro- and nanoscale resolution is often required for deciphering various cellular and molecular phenomena. To address this requirement, we have developed a plasma lithography technique to manipulate the cellular microenvironment by creating a patterned surface with feature sizes ranging from 100 nm to millimeters. The goal of this techniq...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: RSC Advances
سال: 2021
ISSN: 2046-2069
DOI: 10.1039/d1ra02459k