Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

نویسندگان

چکیده

Photonic add-drop filters are crucial components for the implementation of wavelength division multiplexing (WDM) in fiber-optic communication systems. The recent progress photonic integration has shown potential to integrate alongside high-performance building blocks on a chip construct compact and complex photonic-integrated circuits WDM. Typically, implementations based micro-ring resonators with integrated heaters or free carrier dispersion-based modulators adjust filter wavelength. However, suffer from high power consumption, carriers result optical absorption losses, limiting scalability toward very-large-scale circuits. We demonstrate design, simulation, fabrication, experimental characterization vertically movable, MEMS-actuated ring resonator. is implemented IMEC’s iSiPP50G silicon photonics platform realized using short post-processing flow safely release suspended MEMS structures wafer-level compatible process. exhibits through port linewidth ∼1 nm (124.37 GHz) at 1557.1 nm, it retains extinction 20 dB isolation >50 under 27 V actuation voltage. combination low-power consumption footprint demonstrates suitability

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ژورنال

عنوان ژورنال: Journal of optical microsystems

سال: 2022

ISSN: ['2708-5260']

DOI: https://doi.org/10.1117/1.jom.2.4.044001