Selecting metal alloy electric contact materials for MEMS switches
نویسندگان
چکیده
منابع مشابه
Comparison of Au and Au–Ni Alloys as Contact Materials for MEMS Switches
This paper reports on a comparison of gold and gold–nickel alloys as contact materials for microelectromechanical systems (MEMS) switches. Pure gold is commonly used as the contact material in low-force metal-contact MEMS switches. The top two failure mechanisms of these switches are wear and stiction, which may be related to the material softness and the relatively high surface adhesion, respe...
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Research on contact characterization for microelectromechanical system (MEMS) switches has been driven by the necessity to reach a high-reliability level for micro-switch applications. One of the main failures observed during cycling of the devices is the increase of the electrical contact resistance. The key issue is the electromechanical behaviour of the materials used at the contact interfac...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2004
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/14/8/006