Secondary electron emission from magnetron targets

Abstract Ion-induced secondary electron emission of surfaces occurs in all gas discharges which have contact to such as electrodes or chamber walls. These electrons (SEs) play an important role, for instance, the performance DC discharges, RF and magnetron sputtering discharges. SE generation can be separated into potential (PEE) due neutralization incident ion upon impact kinetic (KEE) electronic stopping penetrating solid. is usually described by Auger processes density states solid, whereas KEE scales with being calculated collision simulations. The measurement energy distribution SEs three metals (Al, Ti, Cu) their oxides reveals occurrence peaks, are not reflected standard models Hagstrum model. Instead, this paper, a model proposed describing these peaks holes created cascade ion. This shows decent agreement. contribution Al Ti very significant, it negligible case Cu. implication distributions discussed.