RF sputtering: A viable tool for MEMS fabrication
نویسندگان
چکیده
منابع مشابه
RF sputtering: A viable tool for MEMS fabrication
Fabrication of Micro-Electro-Mechanical-Systems (MEMS) requires deposition of films such as SiO2, Si3N4, ZnO, polysilicon, phosphosilicate glass (PSG), Al, Cr-Au, Pt, etc. for use as structural, sacrificial, piezoelectric and conducting material. Deposition of these materials at low temperature is desirable for fabricating sensors/actuators on temperature-sensitive substrates and also for integ...
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ژورنال
عنوان ژورنال: Sadhana
سال: 2009
ISSN: 0256-2499,0973-7677
DOI: 10.1007/s12046-009-0032-y