منابع مشابه
Modeling of Residual Stresses in Thin Metal Films
Residual mechanical stresses introduced during deposition of thin films and coatings have a significant impact on the reliability of electronic devices and structural components. The mechanical stress in thin metal films consists of a thermal component and an intrinsic component due to the evolution of the metal microstructure during film growth. Controlling of the intrinsic stress component ha...
متن کاملINTERFACES AND STRESSES IN THIN FILMS p
ÐA review of the current understanding of the eect of interfaces on the intrinsic stresses in polycrystalline thin ®lms is given. Special attention is paid to the measurement, modeling and application of surface and interface stresses. Mechanisms for generating the compressive and tensile components of the intrinsic stress are assessed. Prospects for future research are presented. # 2000 Publi...
متن کاملResidual Stress Variation in Polysilicon Thin Films
This paper compares the use of four mechanical methods for characterization of residual stress variation in low pressure chemical vapor deposited (LPCVD) polysilicon thin films deposited, doped, and annealed under different conditions. Stress was determined using buckling structures, vibrating microstructures, static rotating structures and the wafer curvature method. After deposition of 1.0 μm...
متن کاملLoad Deflection Analysis for Determining Mechanical Properties of Thin Films with Tensile and Compressive Residual Stresses
An examination of load deflection (bulge) testing of coated and uncoated membranes by analytical and finite element methods was undertaken. The key parameters in the loaddeflection behavior of a membrane were non-dimensionalized and examined to illustrate how to design test structures for materials systems of interest. Experimental and modelling procedures were examined to improve measurement o...
متن کاملTechnique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings
Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic el...
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ژورنال
عنوان ژورنال: EPJ Web of Conferences
سال: 2010
ISSN: 2100-014X
DOI: 10.1051/epjconf/20100626002