Residual polymer effect on shallow trench Bosch process stability
نویسندگان
چکیده
منابع مشابه
Issues in Shallow Trench Isolation CMP
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2020
ISSN: 2158-3226
DOI: 10.1063/6.0000156