Quasi-analytical and rigorous modeling of interference microscopy
نویسندگان
چکیده
We present an extended vectorial Kirchhoff model of coherence scanning interferometry including several vector rotations occurring in the imagining and scattering process as well polarization dependent reflection coefficients. For validation simulated results are compared to those conventional scalar a rigorous finite element modeling.
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ژورنال
عنوان ژورنال: Epj Web of Conferences
سال: 2022
ISSN: ['2101-6275', '2100-014X']
DOI: https://doi.org/10.1051/epjconf/202226610013