Quantification of High Resolution Pulsed RF GDOES Depth Profiles for Mo/B4C/Si Nano-Multilayers
نویسندگان
چکیده
منابع مشابه
Ionization and Excitation Processes in Analytical Plasma of Gdoes and Gdms Systems Working in Pulsed Rf Regime
The GDOES and GDMS analytical systems working in Pulsed RF regime have some distinct advantages compared to non-pulsed glow discharge analytical systems. In this paper we report a rise in MS ionic signals, and in emission atomic lines of analysts in the beginning of the afterglow of RF pulsed GD sources. Making experimental studies with Langmuir probe we demonstrate that the ionization and exci...
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ii To my dear wife, Liang iii Acknowledgments First, I would like to thank my advisor Professor Larry Pileggi for all his support and continuous guidance throughout the past five years. He opened up a wide variety of research topics that I can explore during my early years at Carnegie Mellon University (CMU) and helped me find my research path that eventually leads to this dissertation. Second,...
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ژورنال
عنوان ژورنال: Coatings
سال: 2021
ISSN: 2079-6412
DOI: 10.3390/coatings11060612