Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation
نویسندگان
چکیده
منابع مشابه
Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation
In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the internal fluid. The results indicate that the system is subjected to both the pull-in instability and t...
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ژورنال
عنوان ژورنال: Sensors
سال: 2017
ISSN: 1424-8220
DOI: 10.3390/s17010114