Production of Extreme High Vaccum by Using a Cylindrical Magnetron Sputter Ion Pump.

Magnetron Sputter Epitaxy of GaN

Anisotropic TixSn1-xO2 nanostructures prepared by magnetron sputter deposition

Regular arrays of TixSn1-xO2 nanoflakes were fabricated through glancing angle sputter deposition onto self-assembled close-packed arrays of 200-nm-diameter polystyrene spheres. The morphology of nanostructures could be controlled by simply adjusting the sputtering power of the Ti target. The reflectance measurements showed that the melon seed-shaped nanoflakes exhibited optimal properties of a...

Sputter-ion Pumps

The following paper outlines the working principles of sputter-ion pumps. The pumping mechanisms for reactive and inert gas species, as well as argon instability are explained. The operating pressure range, special designs for integrated linear pumps in accelerators and operational aspects are discussed.

Magnetron Sputter Epitaxy of GaN Epilayers and Nanorods

Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System

A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...