Preparation of tin oxide (SnO2) thin films using thermal oxidation
نویسندگان
چکیده
منابع مشابه
Characterization of SnO2 Films Prepared Using Tin Tetrachlorid
We have investigated the effect of deposition conditions of SnO2 films, deposited by chemical vapor deposition using tin tetrachloride and tetramethyltin precursors, on the film properties. The type of precursor and the deposition temperature affect the morphology of the films. The structure of the films is determined by the deposition temperature: films deposited at low temperatures show a mix...
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Tin oxide thin films were deposited on the R-cut sapphire substrate by the electron-beam evaporation of a ceramic SnO2 source. X-ray diffraction and transmission electron microscopy studies revealed that the films deposited at lower temperatures were amorphous while those grown at temperatures above 350◦C consisted of the α-SnO phase with the PbO type structure. Epitaxial α-SnO films on the R-c...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2018
ISSN: 1757-8981,1757-899X
DOI: 10.1088/1757-899x/319/1/012022