Preparation of Niobium Nitride Films by CVD
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چکیده
منابع مشابه
Mixed amido/imido/guanidinato complexes of niobium: potential precursors for MOCVD of niobium nitride thin films.
Novel mixed amido/imido/guanidinato complexes of niobium are reported. The complexes were synthesized by insertion of two equivalents of di-isopropylcarbodiimide (i-Pr-cdi) or bis-cyclohexylcarbodiimide (Cy-cdi) respectively, into the niobium-amido bonds of [Nb(NR(2))(3)(N-t-Bu)] (, R = Me; , R = Et) starting out from [NbCl(3)(N-t-Bu)(py)(2)] and the respective LiNR(2) reagent (py = pyridine). ...
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Superconducting thin films have the potential to overcome fundamental limitations of bulk niobium technology that is currently implemented in linear particle accelerators. Before these thin films can successfully be implemented, systematic studies on structureproperty correlations are necessary. Here, we present the characterization of niobium nitride thin films and multilayers. We explore the ...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Association, Japan
سال: 1987
ISSN: 1884-2127,0009-0255
DOI: 10.2109/jcersj1950.95.65