Preparation and properties of a-Si:H films by plasma CVD (glow discharge) method.
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چکیده
منابع مشابه
Glow Discharge Plasma Properties of Gases of Environmental Interest
Experiments in a low pressure glow discharge on gases of environmental relevance: CO2,CO y O2 are reported. We studied the various atomic processes: ionization, excitation and molecular dissociation with typical discharge parameters of p∼0.6 mbar, I≤ 0.1 A and V∼1100 Volts. We used visible and near UV spectroscopy to observe the emitted radiation on both electrodes on pure gases and hydrogen se...
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چکیده ندارد.
15 صفحه اولBulk plasma properties in the pulsed glow discharge
This work focuses on the spatial and temporal characteristics of a glow discharge plasma operated with power pulses of 5 ms in duration at 25% duty cycle. Interpretation of emission data provides insight into the nature of the plasma at each instant of a typical pulse cycle and at each position in space. Because the bulk plasma properties affect the distribution of excited energy levels of the ...
متن کاملGlow discharge plasma switch controlled by a small magnetic field
A cold plasma switch scheme with opening and closing capabilities is reported. An externally applied magnetic field causes a low pressure hollow cathode discharge to transition from a low impedance mode sustained by oscillating beam electrons into a virtually collisionless high impedance mode. The impedance of a 10 A discharge was demonstrated to increase by 20 with the application of a field o...
متن کاملDouble Langmuir probe measurement of plasma parameters in a dc glow discharge
In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and o...
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ژورنال
عنوان ژورنال: Journal of the Metal Finishing Society of Japan
سال: 1988
ISSN: 1884-3395,0026-0614
DOI: 10.4139/sfj1950.39.375