Predictive Antiwindup Compensation for Repetitive Control Supporting Nanoscanning

Ultrahigh precision scanning has emerged as a promising and challenging technology in nanoscale measurement manipulation. Besides the requirement of dynamical tracking periodical references, existence control saturation, due to limited stroke microactuators, poses additional challenges for such systems. To address this problem, we propose repetitive structure with predictive antiwindup compensation support tracking/scanning minimized impact actuator saturation. In particular, proposed compensator is activated by time-lead output ahead saturation time-delay block structure. According input/output (I/O)-based equivalent representation sector bound criterion, stability conditions are derived, which further formulated an H ∞ optimization problem robustness against model uncertainties, where optimal developed. The effectiveness architecture verified real-time experiments on piezoelectric-actuator-driven nanostage, significant improvements demonstrated comparing existing results.