Predicting Thin Film Stoichiometry In V-O2 Reactive Sputtering

The Effect of Substrate on Structural and Electrical Properties of Cu3N Thin Film by DC Reactive Magnetron Sputtering

The aim of this paper is to study the effect of substrate on the Cu3N thin films. At first Cu3N thin films are prepared using DC magnetron sputtering system. Then structural properties, surface roughness, and electrical resistance are studied using X-ray diffraction (XRD), the atomic force microscope (AFM) and four-point probe techniques respectively. Finally, the results are investigated and c...

Optimization of DC reactive magnetron sputtering deposition process for efficient YSZ electrolyte thin film SOFC

Yttria-stabilized zirconia (YSZ, ZrO2:Y2O3) thin films were deposited by reactive DC magnetron sputtering with a high deposition rate from a metallic target of Zr/Y in an argon/oxygen atmosphere. Plasma parameters and composition analysis of the gas phase reveal that the sputtering process in the “compound” mode is reached for a 2.5 sccm oxygen flow rate. Deposition onto silicon in “metal” mode...

Dry and Wet Wear Characteristic of TiO2 Thin Film Prepared by Magnetic Sputtering in Ringer Solution

In this research, a thin film of TiO2 was applied on AZ91D using the method of magnetic sputtering. Microstructure investigations were done using field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD). Wear resistance for the coating was investigated using the pin on the disk in the form of dry and in the Ringer's solution. After this test, the worn surface of the sampl...

Fabrication of InGaN thin-film transistors using pulsed sputtering deposition

We report the first demonstration of operational InGaN-based thin-film transistors (TFTs) on glass substrates. The key to our success was coating the glass substrate with a thin amorphous layer of HfO2, which enabled a highly c-axis-oriented growth of InGaN films using pulsed sputtering deposition. The electrical characteristics of the thin films were controlled easily by varying their In conte...

Thin-film TiPbO3 varistors obtained by two-source magnetron sputtering