منابع مشابه
Relative Humidity Sensors Based on Porous Polysilicon and Porous Silicon Carbide
RH sensors have been made using porous polysilicon and porous SiC, both of which can also be made porous by electrochemical anodisation in HF, similarly to single crystal silicon. We show that polysilicon can be incorporated into a humidity sensor enabling a reduction (compared to single-crystal porous Si) of the effect of temperature on humidity measurements. We show that also porous SiC can a...
متن کاملModeling of an Aged Porous Silicon Humidity Sensor Using ANN Technique
Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: Porous silicon (PS) sensor based on capacitive technique used for measuring relative humidity has the advantages of low cost, ease of fabrication with controlled structure and CMOS compa...
متن کاملHigh Sensitivity Sensor Based on Porous Silicon Waveguide
Porous silicon (PSi) waveguides are fabricated as a new platform for high sensitivity biosensors. Biomolecules infiltrated into the PSi waveguide increase the effective refractive index of the waveguide and change the angle at which incident light couples into a waveguide mode. Due to the high surface area to volume ratio of PSi and the confinement of optical energy in the region where the biom...
متن کاملNovel porous silicon vapor sensor based on polarization interferometry
Optical form birefringence property of porous silicon is used in a compact polarization interferometer to demonstrate a novel optical transduction mechanism for vapor or gas sensing applications. This technique uses high interferometric sensitivity of polarization interference intensity when the porous silicon sample is exposed to solvent vapors. We experimentally demonstrate that the relative ...
متن کاملPhotonic porous silicon as a pH sensor
Chronic wounds do not heal within 3 months, and during the lengthy healing process, the wound is invariably exposed to bacteria, which can colonize the wound bed and form biofilms. This alters the wound metabolism and brings about a change of pH. In this work, porous silicon photonic films were coated with the pH-responsive polymer poly(2-diethylaminoethyl acrylate). We demonstrated that the pH...
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2015
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.127.1397