Polyimide/silica nanocomposites with low values of dielectric permittivity
نویسندگان
چکیده
منابع مشابه
Thickness Dependent Dielectric Strength of a Low-permittivity Dielectric Film
The dielectric strength of a promising interlevel low relative permittivity dielectric is investigated for various film thicknesses and temperatures by using I-V measurements with metalinsulator-semiconductor (MIS) structures. It is found that the dielectric breakdown mechanism also depends on thickness. For relatively thick films (thickness >500 nm), the dielectric breakdown is electromechanic...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2005
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/10/1/034