Platinum and palladium oxalates: positive-tone extreme ultraviolet resists
نویسندگان
چکیده
منابع مشابه
Bis(allenylidene) Complexes of Palladium and Platinum
trans-Bis(alkynyl)palladium complexes, trans-[(PEt3)2Pd(-CtCC{dO}NR2)2] (NR2 = NMe2 (2a), N(CH2)4 (2b)), were synthesized by two different methods: (a) by copper-catalyzed reaction of HCtCC(dO)NR2with [PdCl2(PEt3)2] under basic conditions and (b) by treatingHCtCC(dO)NR2 with AgNO3 followed by transmetalation of the alkynyl ligand from silver to [PdCl2(PEt3)2]. The reaction of AgCtCC(dO)NMe2 (3a...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2015
ISSN: 1932-5150
DOI: 10.1117/1.jmm.14.4.043511