Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection

نویسندگان

چکیده

Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and reflectometry (XRR) performed to determine organosilicon films’ elemental composition density. Spectroscopic ellipsometry measurements carried out refractive index films. Quartz crystal microbalance (QCM) coupled vapor sorption used investigate mechanism several VOC vapors into function deposition conditions. The density PP-HMDSO increased with energy due different chemical proportion free volumes material network. showed affinities towards depending on energy. elaborated lowest revealed good sensitivity VOCs, especially toluene (one BTEX vapors), compared other under higher In addition, selectivity between non-BTEX VOCs such heptane ethanol decreased become zero while increasing

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ژورنال

عنوان ژورنال: Plasma

سال: 2023

ISSN: ['2571-6182']

DOI: https://doi.org/10.3390/plasma6030039