Planar Microcoil Optimization of MEMS Electrodynamic Microspeakers

Characterization of a planar microcoil for implantable microsystems

This paper discusses the modelling, design and characterization of planar microcoils to be used in telemetry systems that supply energy to miniaturized implants. Parasitic electrical effects that may become important at a.c. frequencies of several megahertz are evaluated. The fabrication process and electrical characterization of planar receiver microcoils will be described, and it will be show...

Designing and Fabrication of a New Radiofrequency Planar microcoil for mini-Nuclear Magnetic Resonance

Introduction Radiofrequency planar microcoils are used to increase the resolution of magnetic resonance images of small samples. In this study, we aimed to design and fabricate a spiral planar microcoil constructed on a double-sided printed circuit board (PCB). It has four rings with an internal diameter of 241 microns tuned and matched at 63.8 MHz. Materials and Methods To achieve the maximum ...

Acoustic characteristics of an electrodynamic planar digital loudspeaker.

In this paper, an electrodynamic planar loudspeaker driven by a digital signal is experimentally discussed. The digital loudspeaker consists of 22 voice coils, 11 permanent magnets, a diaphragm with streamlined sections molded in plastic, and a suspension made of handmade Japanese paper between the diaphragm and the frame. First, the acoustic responses are affected by the arrangement of the voi...

Design and optimization of a 3-DOF planar MEMS Stage with integrated thermal position sensors

This work presents the design and optimization of a large stroke planar positioning stage in a single-mask MEMS fabrication process. Electrostatic comb-drive actuators were used to control the position and rotation of the 3-DOF stage. Thermal displacement sensors are integrated to provide feedback. Simulations show that we are able to reach a +/-120μm range of motion and +/-30 degrees of rotati...

The Sandia Ultra - planar , Multi - level MEMS