Planar magnetron sputtering system for ferromagnetic targets using Co-sputtering technique.
نویسندگان
چکیده
منابع مشابه
Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System
A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...
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a cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. the substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. the al/ cu multilayer film was deposited on the glass substrate at the following conditions: working g...
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The structure of the flexible IGZO TFTs was deposited on PET substrates using a magnetron radio frequency co-sputtering system at a low temperature. The resulting flexible IGZO TFTs exhibited the lower subthreshold swing value of 0.25 V/decade and the higher field-effect mobility of 24.4 cm/V-s. The field-effect mobility stability was measured by a bending radius of 1.17 cm under stress time fo...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1984
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.27.829