Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2006
ISSN: 1057-7157
DOI: 10.1109/jmems.2006.886012