Phase Shift Strategies in Phase Shifting Time Averaging Interferometry

Abstract Classical time-averaging interferometry technique is widely used for MEMS/MOEMS dynamic behavior investigations. It provides useful information on resonant vibration frequencies and mode shapes in the form of Bessel fringe images. To evaluate objects’ amplitude distribution, one needs to further process images (besselograms). Among different available approaches besselograms processing, Temporal Phase Shifting particular interest since it most accurate results. However, requires an additional cumbersome correction routine via specially designed look-up-tables fitted calculation algorithm used. In this paper, we numerically investigate possibility reducing argument (phase) evaluation error by phase shifting strategies. Two 5 step algorithms are investigated that purpose. Additionally, a quick robust procedure based evaluated distribution presented. allows us speed up calculations significantly. Moreover, such approach much less susceptible noise comparison look-up-table solution.