Phase Control of Multivalent Vanadium Oxides VO <sub> <i>x</i> </sub> by Ion‐Beam Sputter‐Deposition
نویسندگان
چکیده
Vanadium–oxygen materials are of interest for various applications and fields solid-state physics owing to the unequaled plethora different phases. The wealth phases complexity its phase diagram infer a strong sensitivity on growth parameters each phase. Thus, reproducible vanadium-oxide thin-films defined by nonequilibrium techniques is challenging. Here, it shown that ion-beam sputter-deposition (IBSD) powerful tool reproducibly deposit polycrystalline vanadium oxide films precisely controlling oxygen flux substrate temperature in process. Hence, demonstrated IBSD has potential reliably produce binary (including unstable phases) from vanadium–oxygen space. X-ray diffraction (XRD) Raman spectroscopy used establish map crystalline dependent parameters. In particular, proved thin-film V3O7 can be realized fingerprint unambiguously identified.
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ژورنال
عنوان ژورنال: Physica Status Solidi A-applications and Materials Science
سال: 2022
ISSN: ['1862-6300', '1862-6319']
DOI: https://doi.org/10.1002/pssa.202100828