Parylene-strengthened thermal isolation technology for microfluidic system-on-chip applications
نویسندگان
چکیده
منابع مشابه
Dynamically Programmable Parylene-c Bonding Layer Fluorescence for Re-writable Data Storage on a Microfluidic Chip
Wafer bonding using parylene-C to Si, SiO2 and SiN surfaces has recently been shown to enable high pressure-resistant microfluidic devices with metallization and CMOS-integration capability [1-3]. Here, we report characterization of intermediate parylene-C bonding layer fluorescence (iPBLF) and its use as an on-chip medium for data storage by dynamic programming of iPBLF intensity, using altern...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2006
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.09.024