Particle-Precipitation-Aided Chemical Vapor Deposition of Titanium Nitride
نویسندگان
چکیده
منابع مشابه
A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition
In this paper, we reviewed researches about the titanium nitride (TiN) and titanium carbide (TiC) single and multilayer coatings. These coatings were deposited by the plasma assisted chemical vapor deposition (PACVD) technique. Plasma-based technologies are used for the processing of thin films and coatings for different applications such as automobile and aerospace parts, computer disc drives,...
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ژورنال
عنوان ژورنال: Journal of the American Ceramic Society
سال: 1997
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1997.tb02878.x