Parametric Resonance in Electrostatically Actuated Micromirrors

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Generalized Parametric Resonance in Electrostatically-Actuated Microelectromechanical Oscillators

This paper investigates the dynamic response of a class of electrostatically-driven microelectromechanical (MEM) oscillators. The particular systems of interest are those which feature parametric excitation that arises from forces produced by fluctuating voltages applied across comb drives. These systems are known to exhibit a wide range of behaviors, some of which have escaped explanation or p...

متن کامل

Stabilization of Electrostatically Actuated Micro-pipe Conveying Fluid Using Parametric Excitation

This paper investigates the parametric excitation of a micro-pipe conveying fluid suspended between two symmetric electrodes. Electrostatically actuated micro-pipes may become unstable when the exciting voltage is greater than the pull-in value. It is demonstrated that the parametric excitation of a micro-pipe by periodic (ac) voltages may have a stabilizing effect and permit an increase of the...

متن کامل

Pull-in Dynamics of Electrostatically-actuated Beams

We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensio...

متن کامل

Topology optimization of electrostatically actuated microsystems

This study addresses the design of electrostatically actuated microelectromechanical systems by topology optimization. The layout of the structure and the electrode are simultaneously optimized. A novel, continuous, material-based description of the interface between the structural and electrostatic domains is presented that allows the optimization of the interface topology. The resulting topol...

متن کامل

Electrostatically actuated dip pen nanolithography probe arrays

Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the process throughput have focused on passive multi-probe arrays and active arrays based on thermal bimetallic actuation. This paper describes the first use of electrostatic actuation to create an active DPN probe array. Elec...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: IEEE Transactions on Industrial Electronics

سال: 2017

ISSN: 0278-0046,1557-9948

DOI: 10.1109/tie.2016.2615274