Optimization of SnO2-Based CMOS-Integrated Gas Sensors by Mono-, Bi- and Trimetallic Nanoparticles
نویسندگان
چکیده
In this paper, we report on the optimization of SnO2-based thin film gas sensor devices by mono-, bi- and trimetallic nanoparticles. Ag, AgRu, AgRuPd nanoparticles are sputter deposited CMOS-integrated SnO2-thin devices. The CMOS device is a worldwide unique chip containing an array eight microhotplates. response towards target CO was dramatically increased from 10% to more than 70% using
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ژورنال
عنوان ژورنال: Proceedings
سال: 2021
ISSN: ['0890-1740']
DOI: https://doi.org/10.3390/proceedings2020056043