One MEMS design tool with maximal six design flows
نویسندگان
چکیده
منابع مشابه
One MEMS Design Tool with Maximal Six Design Flows
This paper presents one MEMS design tool with total six design flows, which makes it possible that the MEMS designers are able to choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are lumped-element model based system level, finite element analysis based device level and process le...
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This paper presents one MEMS design tool with total six design flows, which makes it possible that the MEMS designers are able to choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are lumped-element model based system level, finite element analysis based device level and process le...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2008
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-007-0546-3