One-dimensional simulation of Ar dielectric barrier discharge driven by combined rf/dc sources at atmospheric pressure

<sec>We present the dielectric barrier discharge (DBD) mechanism of argon (Ar) plasma driven by a combination radio frequency (rf) voltage source and direct current (dc) at atmospheric pressure, based on one-dimensional self-consistent coupled fluid model. Using finite element method (FEM) to numerically calculate model, average value period electron density varying with gas in one rf period, variation minimum sustaining are obtained under different dc voltages. In addition, spatiotemporal distribution generation rate, spatial temperature, time-domain conduction flowing studied. The results show that introduction has significant effect process pressure Ar gas, parameters state changed correspondingly. is mainly controlled air gap voltage, affects changing charge surface. <i>V</i><sub>rf,min </sub>first increases then decreases increase voltage. amplitude And when reached or exceeded, power supply.</sec><sec>On hand, <i>α</i> mode, low, electrons generated near ground electrode. electric field intensity ionization area too small maintain ionization. When high, sheath formed, sheaths both sides boundary region. γ equal greater than sustain amplitude, i.e. <i>V</i><sub>rf </sub>≥ <i>V</i><sub>rf,min</sub>, almost unaffected voltage.</sec><sec>On other cannot be sustained for low resulting failure form main area. Therefore, temperature generally high. Owing high electrode, higher. less so lower. getting larger, region formed. significantly controlling length region.</sec><sec>Finally, α medium very negative As result, few can reach surface dielectric, small. With across increases, electrons, action field, flow from having some speedy non-localization have reflected back sheath, reduction number surface.</sec>