On Resolution 22

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Maskless Plasmonic Lithography at 22 nm Resolution

Optical imaging and photolithography promise broad applications in nano-electronics, metrologies, and single-molecule biology. Light diffraction however sets a fundamental limit on optical resolution, and it poses a critical challenge to the down-scaling of nano-scale manufacturing. Surface plasmons have been used to circumvent the diffraction limit as they have shorter wavelengths. However, th...

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ژورنال

عنوان ژورنال: Annals of Emergency Medicine

سال: 2017

ISSN: 0196-0644

DOI: 10.1016/j.annemergmed.2016.11.011