ON MASS SENSING USING MICRO/NANO RESONATORS - APPROACHES, CHALLENGES AND DIRECTIONS
نویسندگان
چکیده
منابع مشابه
On Mass Sensing Using Micro/nano Resonators - Approaches, Challenges and Directions
Micro/Nano electromechanical systems based Mass sensors are being increasingly used for detecting very low masses, with significant applications in bio-sensing as well as environmental sensing. A number of different shapes, excitation mechanisms as well as materials have been suggested for these sensors. In addition, with reducing dimensions due to improvement in fabrication, these sensors have...
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ژورنال
عنوان ژورنال: International Journal on Smart Sensing and Intelligent Systems
سال: 2016
ISSN: 1178-5608
DOI: 10.21307/ijssis-2017-856