Nonlinear Vibration of Electrostatically Actuated Microbeam

In this paper, an analytical technique based on the global residue harmonic balance method (GRHBM) is applied in order to obtain higher-order approximate solutions of electrostatically actuated micro-beam. To illustrate applicability and accuracy method, a high level was established for by comparing results with numerical solution as well already published literature, such variational approach (VA), Hamiltonian (HA), energy (EBM), homotopy analysis (HAM). It shown that GRHB can be easily nonlinear problems provides higher precision than existing methods. The obtained expressions are employed study effects axial force, initial gape, electrostatic load frequency.