Near total reflection x-ray photoelectron spectroscopy: quantifying chemistry at solid/liquid and solid/solid interfaces

نویسندگان

چکیده

Near total reflection regime has been widely used in X-ray science, specifically grazing incidence small angle scattering and hard photoelectron spectroscopy. In this work, we introduce some practical aspects of using near ambient pressure spectroscopy apply technique to study chemical concentration gradients a substrate/photoresist system. Experimental data are accompanied by optical photoemission simulations quantitatively probe the photoresist interface with depth accuracy ~1 nm. Together, our calculations experiments confirm that is suitable method extract information from buried interfaces highest depth-resolution, which can help address open research questions regarding understanding profiles, electrical gradients, charge transfer phenomena at such interfaces. The presented methodology especially attractive for solid/liquid studies, since it provides all strengths Bragg-reflection standing-wave without need an artificial multilayer mirror serving as standing wave generator, thus dramatically simplifying sample synthesis.

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ژورنال

عنوان ژورنال: Journal of Physics D

سال: 2021

ISSN: ['1361-6463', '0022-3727']

DOI: https://doi.org/10.1088/1361-6463/ac2067