Nanostructured Materials Based on Thin Films and Nanoclusters for Hydrogen Gas Sensing

In this paper, we present two approaches to synthesize nanostructured metal oxide semiconductors in a form of multi-layer thin films later assembled as conductometric gas-sensors. The first approach produces combination solid film tungsten trioxide (WO3) with nanoclusters cupric (CuO) prepared by magnetron-based gas aggregation cluster source (GAS). second method is two-step reactive magnetron sputtering forming copper tungstate (CuWO4) on-top WO3 film. Both methods lead synthesis nanosized hetero-junctions. These greatly improve the sensorial response hydrogen comparison alone.