Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Ten-nanometer Level Lithography Using Scanning Probe Microscopy.
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چکیده
منابع مشابه
Trend in Operando Nanoscale Characterization using Scanning Probe Microscopy
2017[9] THE HITACHI SCIENTIFIC INSTRUMENT NEWS ー 2017 Vol.8 Fine-grain control of the structure of materials is widely regarded as a crucial technology undergirding innovation in materials science. Today, thanks to nanotechnology initiatives launched at the beginning of the 21st century, materials and device elements with a fi ne grain structure can be produced and distributed as nano-products....
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1998
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.19.722