Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes
نویسندگان
چکیده
Mechanical properties of a nanomechanical resonator significantly impact the performance resonant Nano-electromechanical system (NEMS) device. We study mechanical suspended membranes fabricated out low-pressure chemical vapor deposited silicon nitride thin films. doubly-clamped with thickness less than 50 nm and length varying from 5 to 60 μm. The elastic modulus stress in were measured using Atomic Force Microscope (AFM)-based spectroscopy. moduli are higher those corresponding on-substrate observed reduction net after fabrication membrane, which is explained by estimating thermal intrinsic stress. also use mathematical model thickness-dependent ultrathin membranes. Lastly, we capillary force-gradient between SiN x membrane-Si substrate that could collapse membrane.
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ژورنال
عنوان ژورنال: European Physical Journal-applied Physics
سال: 2021
ISSN: ['1286-0050', '1286-0042']
DOI: https://doi.org/10.1051/epjap/2021210068