Nanoindentation technique for characterizing cantilever beam style RF microelectromechanical systems (MEMS) switches
نویسندگان
چکیده
منابع مشابه
RF MEMS Switches
An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2005
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/15/6/013