Nanoindentation of functionally graded hybrid polymer/metal thin films
نویسندگان
چکیده
منابع مشابه
Nanoindentation of GaSe thin films
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Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metalorganic chemical-vapor deposition (MOCVD) derived Si-doped (2 9 10 cm) GaN template by using the helicon sputtering system. The XTEM sam...
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2013
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2013.08.009