منابع مشابه
Review Article Direct-Write Ion Beam Lithography
Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that can be used to create microscale and nanoscale designs on the surface of practically any solid sample material. Based on the type of ion-sample interaction utilized, FIBbasedmanufacturing can be both subtractive and additive, even in the same processing step. Indeed, the capability of easily creating thr...
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Silver metal clusters have been formed in soda lime glass by high-energy heavy ion diation at ISL. The metal cluster formation was detected with X-ray absorption spe copy (EXAFS) in fluorescence mode, and the shape of the clusters was imaged transmission electron microscopy. While annealing in reducing atmosphere alone a leads to the formation of metal clusters in Ag containing glasses, where t...
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In this paper, a remote O2 ion source is used for the formation of nano-oxide layers. The oxidation efficiency was measured in CoFe-oxide films, and a decrease of the oxide layer with the pan angle and the oxidation pressure is observed. For the same oxidation pressure, the oxidation efficiency depends on the O2 content in the Ar–O2 plasma. These results were applied in optimizing the fabricati...
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To date, nano-and micro-structuring has commonly been implemented by a combination of specifically optimized processes of electron-beam lithography and reactive ion etching, thus limiting the range of materials that can be structured to only a few. In this talk we will introduce focused ion beam (FIB) milling as an emerging technology that enables fast, reliable and well-controlled nanometer-si...
متن کاملFocused Ion Beam Based Three-Dimensional Nano-Machining
In recent days, the micro/nano machining becomes an important process to fabricate micro/nano scale dimensional patterns or devices for many applications, especially in electrical and electronic devices. There are two kinds micro-machining in use. i) bulk micromachining, ii) surface micro-maching. In the case of bulk micromaching, the structures can be made by etching inside a substrate selecti...
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ژورنال
عنوان ژورنال: Nanofabrication
سال: 2016
ISSN: 2299-680X
DOI: 10.1515/nanofab-2015-0006