Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)
نویسندگان
چکیده
منابع مشابه
Nano-imprinting of highly ordered nano-pillars of lithium niobate (LiNbO3)
Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 ...
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ژورنال
عنوان ژورنال: Ferroelectrics
سال: 2012
ISSN: 0015-0193,1563-5112
DOI: 10.1080/00150193.2012.676955