Monolithic Fabrication of NPN/SiN x Dual Membrane Cavity for Nanopore‐Based DNA Sensing
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Advanced Materials Interfaces
سال: 2019
ISSN: 2196-7350,2196-7350
DOI: 10.1002/admi.201900684