Monitoring the microstructure of nanosized palladium layers obtained via thermal and VUV stimulated MOCVD
نویسندگان
چکیده
منابع مشابه
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This work represents a complete study of GaN annealed in H2, HCl, NH3 and N2. The GaN thermal behavior was evaluated by comparison of MOCVD and HVPE samples. The MOCVD films were found to obey a dissociative sublimation mechanism with only gaseous species forming, while the HVPE films reacted with ambient gases to form condensed Ga in addition to the gaseous species. Differences in crystal qual...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2013
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2013.06.049