Molecular Dynamics Study of Impurity Effects on Grain Boundary Grooving
نویسندگان
چکیده
منابع مشابه
Molecular Dynamics Analysis of Grain-Boundary Grooving in Thin-Film Interconnects for ULSIs
Grain-boundary grooving in an Al thin film was analyzed by molecular-dynamics simulation. The simulation result showed that the groove was formed by atom transport due to diffusion at the intersection of the grain-boundary and free surface. The effect of impurity on groove formation was analyzed in terms of atomic radius and bond energy. It was found that when the atomic radius of an impurity i...
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ژورنال
عنوان ژورنال: JSME international journal. Ser. A, Mechanics and material engineering
سال: 1997
ISSN: 1340-8046
DOI: 10.1299/jsmea1993.40.1_15