Modelling, Fabrication and Testing of RF Micro-Electro-Mechanical-Systems Switch
نویسندگان
چکیده
This paper presents an approach to evaluate capacitance developed by perforated membrane of RF MEMS switch with high accuracy. An analytical model is for both upstate and downstate including parasitic fringing field in parallel plate model. The proposed includes the ligament efficiency term directly formula which reduce efforts calculate it individually various perforation sizes. analysis has been carried out varying physical parameters optimize dimensions these results are compared simulation 3D FEM tool COMSOL multiphysics validation. then benchmark models understand estimating up capacitances. proved be good less error percentage 2.13% at 2.59% whereas other gives greater than 5% error. fabricated using 4-mask surface micromachining process experimental evaluation DC probe station. Experimentally, obtained as 37.4 fF 2.43 pF exhibited low 3.95% 2.05% condition μ=0.5.
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ژورنال
عنوان ژورنال: IEEE open journal of nanotechnology
سال: 2023
ISSN: ['2644-1292']
DOI: https://doi.org/10.1109/ojnano.2022.3232182