Modeling the Point-Spread Function in Helium-Ion Lithography
نویسندگان
چکیده
منابع مشابه
Modeling the point-spread function in helium-ion lithography.
We present here a hybrid approach to modeling helium-ion lithography that combines the power and ease-of-use of the Stopping and Range of Ions in Matter (SRIM) software with the results of recent work simulating secondary electron (SE) yield in helium-ion microscopy. This approach traces along SRIM-produced helium-ion trajectories, generating and simulating trajectories for SEs using a Monte Ca...
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ژورنال
عنوان ژورنال: Scanning
سال: 2011
ISSN: 0161-0457
DOI: 10.1002/sca.20290